Perspectives of microsystem engineering development in Russia

Petr P. Maltsev

doi:10.1117/12.462828

19 April 2002 Perspectives of microsystem engineering developments in Russia

Petr P. Maltsev

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462828
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Modem status of technique of new generation and "critical" technologies in a number of the most developed countries is characterized by Microsystem technology dynamic development from the beginning of the 90-th years ("microsystems technology " - MST) that determined the creation of a new scientific and technical direction - "microsystem engineering " ("mirosystems engineering " MSE).

Citation Download Citation

Petr P. Maltsev "Perspectives of microsystem engineering developments in Russia", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462828

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