Paper
15 August 1984 Optimization Of Broadband Electrically Excited Excimer Lasers
F. K. Tittel, W. L. Wilson, N. Nishida, Y. Zhu, W. L. Nighan, Y. Nachshon
Author Affiliations +
Abstract
In this paper the factors controlling the performance of electron beam-pumped, broadband diatomic and tri-atomic rare gas-halide excimer lasers are discussed. Particular attention is directed toward the blue/green in the XeF(C>A) laser centered at 485 nm, for which significantly improved performance has been obtained by selective tailoring of mixture kinetic processes. Maximum XeF(C>A) laser output energies in excess of 1.5 J/liter have been achieved, corresponding to an intrinsic efficiency of approximately 1%.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. K. Tittel, W. L. Wilson, N. Nishida, Y. Zhu, W. L. Nighan, and Y. Nachshon "Optimization Of Broadband Electrically Excited Excimer Lasers", Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); https://doi.org/10.1117/12.942568
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KEYWORDS
Excimer lasers

Absorption

Laser energy

Krypton

Xenon

Argon

Pulsed laser operation

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