Pump-probe extreme ultraviolet and x-ray studies of laser-droplet plasma dynamics

Stuart J. McNaught; Jingyun Fan; Enrique Parra; Howard M. Milchberg

doi:10.1117/12.482114

13 September 2002 Pump-probe extreme ultraviolet and x-ray studies of laser-droplet plasma dynamics

Stuart J. McNaught, Jingyun Fan, Enrique Parra, Howard M. Milchberg

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482114
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

A series of experiments has been performed to investigate the interaction of intense laser pulses with cryogenic noble gas droplets. Understanding of the time scales for this interaction is important for optimization of extreme ultraviolet (EUV) sources for next-generation lithography that utilize laser-produced plasmas. The temporal character of the plasma formed by the irradiation of micron-sized argon and krypton droplets with intense 200-mJ, 100-ps laser pulses was investigated using a pump-probe scheme. The evolution of the droplet plasma was assessed by monitoring delay-dependent x-ray and EUV emission, and by imaging frequency-doubled probe light scattered from the interaction region. Depending on the spectral region of interest and the droplet characteristics, the effective plasma lifetime extends from a few hundred picoseconds to several nanoseconds. These results are explained in terms of the plasma expansion, excitation emission, and recombination emission time scales.

Citation Download Citation

Stuart J. McNaught, Jingyun Fan, Enrique Parra, and Howard M. Milchberg "Pump-probe extreme ultraviolet and x-ray studies of laser-droplet plasma dynamics", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482114

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available