Application Of Electron - Optical Instruments For Measuring Small Pattern Features In Microlithography

Reiner Plontke

doi:10.1117/12.943056

15 October 1984 Application Of Electron - Optical Instruments For Measuring Small Pattern Features In Microlithography

Reiner Plontke

Proceedings Volume 0480, Integrated Circuit Metrology II; (1984) https://doi.org/10.1117/12.943056
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

The fabrication of microelectronic components calls for efficient inspection instruments for checking the dimensional fidelity of micropatterns on masks and semiconductor wafers. The task, in particular, is to measure feature sizes from some microns down to 0,1μm and distances between line edges up to 150 mm. For solving this tasks electron microscopes are advantageous used. Recently a new precision measuring instrument has been developed by Jenoptik GmbH Jena: the ZRM 20 Electron-Beam Measuring and Inspection System. In the following a short description of the instrument will be given, in particular, of such functional subsystems, which determine the prerequisite to a high measuring accuracy and measuring speed.

Citation Download Citation

Reiner Plontke "Application Of Electron - Optical Instruments For Measuring Small Pattern Features In Microlithography", Proc. SPIE 0480, Integrated Circuit Metrology II, (15 October 1984); https://doi.org/10.1117/12.943056

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available