Paper
23 January 2003 Large-area IR negative luminescent devices
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Abstract
Negative luminescent (NL) devices, which to an IR observer appear colder than they actually are, have a wide range of possible applications, including for use as IR sources in gas sensing systems and as thermal radiation shields in IR cameras. Additionally these devices can be used as calibration sources for very large IR focal plane arrays and have many potential advantages over conventional calibration sources, including high speed operation and low power consumption. For many of these applications a large area device which displays as large area device which displays as large as possible apparent temperature range is required. However, under reverse bias significant currents are required to reduce the carrier concentrations to the levels needed for maximum dynamic range. We have therefore used a novel micromachining techniqe to fabricate integrated optical concentrators in InSb/InAlSb and HgCdTe NL devices. Smaller area diodes can then be used to achieve the same absorption and the required currents are thus reduced. To fabricate the concentrators, spherical resist masks are first produced by resist reflow. Inductively coupled plasma etchign is then used to alternatley etch the resist mask and the semiconductor, with oxygen and methane/hydrogen respectively, producing concentrators with almost parabolic profiles. Recent results from large area medium wavelength devices with integrated optical concentrators are presented, together with a description of the continuing optimization of the process and progress towards the fabrication of large area long wavelength devices.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Geoff R. Nash, Tim Ashley, Neil T. Gordon, C. L. Jones, C. D. Maxey, and R. A. Catchpole "Large-area IR negative luminescent devices", Proc. SPIE 4820, Infrared Technology and Applications XXVIII, (23 January 2003); https://doi.org/10.1117/12.451968
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KEYWORDS
Solar concentrators

Semiconductors

Etching

Thermography

Diodes

Integrated optics

Sensors

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