Micromachined deformable mirrors for adaptive optics

Thomas G. Bifano; Julie A. Perreault; Paul A. Bierden; Clara E. Dimas

doi:10.1117/12.457847

6 November 2002 Micromachined deformable mirrors for adaptive optics

Thomas G. Bifano, Julie A. Perreault, Paul A. Bierden, Clara E. Dimas

Proceedings Volume 4825, High-Resolution Wavefront Control: Methods, Devices, and Applications IV; (2002) https://doi.org/10.1117/12.457847
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Recent progress on deformable mirror systems made at Boston University and Boston Micromachines Corporation is described. The mirror's optical, electrical, and mechanical performance characteristics are summarized, and the effects of air damping on performance are described. Two applications that have employed the μDM in laser communications and retinal imaging are introduced.

Citation Download Citation

Thomas G. Bifano, Julie A. Perreault, Paul A. Bierden, and Clara E. Dimas "Micromachined deformable mirrors for adaptive optics", Proc. SPIE 4825, High-Resolution Wavefront Control: Methods, Devices, and Applications IV, (6 November 2002); https://doi.org/10.1117/12.457847

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