Scanning probe microscopy for nanotechnology

Victor A. Bykov

doi:10.1117/12.484562

29 July 2002 Scanning probe microscopy for nanotechnology

Victor A. Bykov

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484562
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The review on the contact and noncontact scanning probe techniques for nanoscale operations and control are given in this article. The problems of development of these tools are discussed. The examples of surface images for different materials up to the atomic resolution are presented.

Citation Download Citation

Victor A. Bykov "Scanning probe microscopy for nanotechnology", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484562

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