Numerical simulation of nonlinear electric field for diamond film gowth via EACVD

Qingxun Zhao; Hongli Xin; Qinruo Wen; Jingfa Yang; Jing Zhang; Zheng Yan

doi:10.1117/12.465650

20 September 2002 Numerical simulation of nonlinear electric field for diamond film gowth via EACVD

Qingxun Zhao, Hongli Xin, Qinruo Wen, Jingfa Yang, Jing Zhang, Zheng Yan

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.465650
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Monte Carlo simulations are adopted to develop a numerical program to study the electron motion in the H₂/CH₄ gas mixture and the non-uniform electric field during diamond synthesis via Electric Assisted Chemical Vapor Deposition (EACVD) in order to understand this dynamical process. It is proved in this paper that there exists a reverse electric field near the substrate. With this reverse electric field, the effective radicals such as CH₃⁺ and CH⁺ can be speeded up and impact on the substrate with a higher speed, thus increase the probability of bonding. At last the electron average energy distribution and the steady space distributions of the effective radicals such as CH₃, CH₃⁺, CH⁺ and H under this field distribution are given in this paper.

Citation Download Citation

Qingxun Zhao, Hongli Xin, Qinruo Wen, Jingfa Yang, Jing Zhang, and Zheng Yan "Numerical simulation of nonlinear electric field for diamond film gowth via EACVD", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.465650

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