Paper
10 September 2002 Fabrication of 1.3-μm Si-based MEMS tunable optical filter
Yuhua Zuo, Changjun Huang, Buwen Cheng, Rongwei Mao, Liping Luo, Junhua Gao, Y. X. Bai, Liangchen Wang, Jinzhong Yu, Qiming Wang
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Abstract
In this paper we report the fabrication of 1.3µm Si-based MEMS tunable optical filter, by surface micromaching. Through wet etching of polyimide sacrificial layer, a tunable Fabry-Perot filter was successfully fabricated. We make the capacitance measurement of the prototype device, compare the experimental curve with the theoretical one, and explain the difference between them.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuhua Zuo, Changjun Huang, Buwen Cheng, Rongwei Mao, Liping Luo, Junhua Gao, Y. X. Bai, Liangchen Wang, Jinzhong Yu, and Qiming Wang "Fabrication of 1.3-μm Si-based MEMS tunable optical filter", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483151
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KEYWORDS
Capacitance

Optical filters

Silicon

Microelectromechanical systems

Analytical research

Electrodes

Fabry–Perot interferometers

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