Promise and challenge of DUV speckle interferometry

Petra Aswendt

doi:10.1117/12.516619

27 May 2003 Promise and challenge of DUV speckle interferometry

Petra Aswendt

Proceedings Volume 4933, Speckle Metrology 2003; (2003) https://doi.org/10.1117/12.516619
Event: Speckle Metrology 2003, 2003, Trondheim, Norway

Abstract

The paper explains the benefits and the application limits of micro speckle interferometry (MSI) and it shows the potential for improvements when a deep UV laser source is used. For the experiments, a new deep ultraviolet micro speckle interferometer (DUV-MSI) was designed operating at 266 nm of wavelength. The implemented optics enables for the measurement of both, in-plane and out-of-plane movements on the microparts. A number of practical examples are shown in the paper in order to illustrate the advantages of a shorter wavelength in speckle interferometry.

Citation Download Citation

Petra Aswendt "Promise and challenge of DUV speckle interferometry", Proc. SPIE 4933, Speckle Metrology 2003, (27 May 2003); https://doi.org/10.1117/12.516619

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