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The magnetic nanoparticles are fabricated in silica glass (SiO2) using high-flux implantation of nickel negative-ions of 60 keV. Photo-absorption measurements and the cross-sectional transmission electron microscopy (XTEM) observation confirm formation of metallic Ni nanoparticles in SiO2, and exclude possible formation of Ni silicides (Ni3Si, Ni2Si, NiSi) and oxides (NiO) as major products. The mean diameter of the nanoparticles was in ~2.9 nm, and the depth distribution was similar to the prediction from the TRIDYN code with taking account of the sputtering. Temperature- and field- dependences of magnetization show that the nanoparticles are in the super-paramagnetic state with a blocking temperature of ~27 K.
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