Emerging leadership of surface-micromachined MEMS for wavelength switching in telecommunication systems

Bevan D. Staple; Lilac Muller; David C. Miller

doi:10.1117/12.472873

16 January 2003 Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems

Bevan D. Staple, Lilac Muller, David C. Miller

Author Affiliations +

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.472873
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

We introduce the Network Photonics’ CrossWave as the first commercially-available, MEMS-based wavelength selective switch. The CrossWave combines the functionality of signal de-multiplexing, switching and re-multiplexing in a single all-optical operation using a dispersive element and 1-D MEMS. 1-D MEMS, where micromirrors are configured in a single array with a single mirror per wavelength, are fabricated in a standard surface micromachining process. In this paper we present three generations of micromirror designs. With proper design optimization and process improvements we have demonstrated exceptional mirror flatness (<16.2m^-1curvature), surface error (

Citation Download Citation

Bevan D. Staple, Lilac Muller, and David C. Miller "Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.472873

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