Shot noise effect on printing small contacts in EUVL

Sang Hun Lee; Robert L. Bristol; John E. Bjorkholm

doi:10.1117/12.484982

16 June 2003 Shot noise and process window study for printing small contact holes using EUV lithography

Sang Hun Lee, Robert L. Bristol, John E. Bjorkholm

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.484982
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

A theoretical analysis of the capability of Extreme Ultra-violet Lithography (EUVL) to print contacts in the range of 30-50 nm with acceptable yield is presented. We study the problem from the viewpoint of two issues: the effects of shot noise and the available process window. Shot noise is modeled as a simple statistical fluctuation of the number of photons absorbed in a given contact. The process windows for various size contacts are simulated for a representative 0.25-NA EUV tool. We find that EUVL should be able to print 30 nm contacts with a reasonable exposure latitude, and we also conclude that the effects of shot noise will not significantly decrease yield at this exposure latitude for a resist with a dose-to-clear value of ~5 mJ/cm2. A dose-to-clear value becomes ~2 mJ/cm2 for 50 nm contacts. In addition, a comparison at the same node shows that 50-nm contacts have a greater process window than 30-nm lines.

Citation Download Citation

Sang Hun Lee, Robert L. Bristol, and John E. Bjorkholm "Shot noise and process window study for printing small contact holes using EUV lithography", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.484982

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