Paper
14 August 2003 Miniature actuator using thin-film shape-memory alloy
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Abstract
In this paper, a thin film nickel-titanium (NiTi) shape memory alloy (SMA) was used to develop a prototype compact hybrid actuator. SMA was selected as an actuating mechanism because it had the highest work density among active materials. Combining this attribute with high frequency response of thin films resulted in large power output. High drive frequency was also possible in part from manipulating the liquid flow to directly cool the SMA membranes. The actuator reached a drive frequency of 100Hz while producing 2.6Watts. The results indicated that power output is linearly related to the drive frequency since the volume flow rate increased proportional to frequency.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel D. Shin, Kotekar Panduranga Mohanchandra, Dong Gun Lee, and Gregory Paul Carman "Miniature actuator using thin-film shape-memory alloy", Proc. SPIE 5054, Smart Structures and Materials 2003: Industrial and Commercial Applications of Smart Structures Technologies, (14 August 2003); https://doi.org/10.1117/12.483732
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Cited by 2 scholarly publications.
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KEYWORDS
Actuators

Shape memory alloys

Thin films

Liquids

Head

Thin film devices

Nitrogen

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