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A pencil-shaped electrochemical transducer system for analysis
or surface modification in nanometer dimension has been
developed. High aspect ratio tip structures are shaped
combining isotropic and anisotropic deep reactive etch
processes to form the body of the transducer. In this way, tips
with an aspect ratio higher than 20 and a tip radius of smaller
than 50 nm can be achieved. Subsequently, a three-layer
system (an isolation layer: silicon nitride, a metal layer:
platinum or gold and an isolation layer: silicon nitride) was
deposited on the tip structure. Planarization of this structure
in combination with a back etch process enables a precise
exposure of the buried metal layer down to an electrode
dimension of 200 nm on the tip.
Electrochemical and impedance spectroscopic characterization
showed full electrochemical functionality of the transducer
system. Due to the high aspect ratio topography, this probe is
particularly suited for Scanning Electrochemical Microscope
(SECM) - methodologies.
Furthermore this technology promises a feasible production
possibility for both probe-arrays and probes on cantilevers.
Rainer J. Fasching,Ye Tao,Kyle Hammerick, andFritz B. Prinz
"Pencil probe system for electrochemical analysis and modification in nanometer dimensions", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499065
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Rainer J. Fasching, Ye Tao, Kyle Hammerick, Fritz B. Prinz, "Pencil probe system for electrochemical analysis and modification in nanometer dimensions," Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499065