Micro-optical element on SiN membrane

Jenq Yang Chang; Yu Cheng Chang; Chien Chieh Lee; Chi Ming Wang

doi:10.1117/12.504415

3 November 2003 Micro-optical element on SiN membrane

Jenq Yang Chang, Yu Cheng Chang, Chien Chieh Lee, Chi Ming Wang

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.504415
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

Citation Download Citation

Jenq Yang Chang, Yu Cheng Chang, Chien Chieh Lee, and Chi Ming Wang "Micro-optical element on SiN membrane", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.504415

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