Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter

YongWoo Lee; TongJin Park; HyunSeok Choi; ChangSoo Han; TaeHoon Choi; NakKyu Lee; HyoungWook Lee; KyungHwan Na

doi:10.1117/12.526563

15 July 2004 Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter

YongWoo Lee, TongJin Park, HyunSeok Choi, ChangSoo Han, TaeHoon Choi, NakKyu Lee, HyoungWook Lee, KyungHwan Na

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.526563
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real-time. The interferometer system is modeled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modeling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high precision displacement measurement in real-time.

Citation Download Citation

YongWoo Lee, TongJin Park, HyunSeok Choi, ChangSoo Han, TaeHoon Choi, NakKyu Lee, HyoungWook Lee, and KyungHwan Na "Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.526563

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