Microaccelerometers using cured SU-8 as structural material

Seok Jae Jeong; Wanjun Wang

doi:10.1117/12.530783

24 January 2004 Microaccelerometers using cured SU-8 as structural material

Seok Jae Jeong, Wanjun Wang

Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.530783
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

In this paper, we report a research effort to design, analyze, and fabricate a novel type of microaccelerometer using UV lithography of SU-8 and UV-LIGA process. Instead of using SU-8 only as photo resist as in silicon-based MEMS fabrication processes, cured SU-8 was used as the primary structural material in fabricating the micro sensors. A commercial software, ANSYS, was used to design the suitable size for the spring-mass and capacitors to achieve the desired bandwidth and the maximum sensitivity. The preliminary results obtained so far have proved the feasibility of fabrication of micro accelerometer using cured SU-8 polymer as the primary structural material and using UV-LIGA as the major fabrication tool.

Citation Download Citation

Seok Jae Jeong and Wanjun Wang "Microaccelerometers using cured SU-8 as structural material", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); https://doi.org/10.1117/12.530783

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