MEMS tunable optical filter based on photonic crystal

Huibing Mao

doi:10.1117/12.529237

24 January 2004 MEMS tunable optical filter based on photonic crystal

Huibing Mao

Proceedings Volume 5346, MOEMS and Miniaturized Systems IV; (2004) https://doi.org/10.1117/12.529237
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Photonic crystal with defects such as (L₁H₁)^m L_CH₂(L₂H₂)ⁿ is investigated in this paper. The band gap edge transmission peak is narrowed when the couple-layer LC and the cover layer H₂(L₂H₂)ⁿ are added to the photonic crystal (L₁H₁)^m. Two different structures were studied in thip paper. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structure B provides a good optical tuning method: large dynamic range (>150 nm), narrow bandwidth (FWHM is about 2 nm) and good tuning linearity. This kind of structure can be fabricated by the surface micromachined technique easily.

Citation Download Citation

Huibing Mao "MEMS tunable optical filter based on photonic crystal", Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); https://doi.org/10.1117/12.529237

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