X-Ray Lithography: Can It Be Justified

Alan D. Wilson

doi:10.1117/12.947489

20 June 1985 X-Ray Lithography: Can It Be Justified

Alan D. Wilson

Proceedings Volume 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV; (1985) https://doi.org/10.1117/12.947489
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

X-Ray lithography: Can it be justified? This is a question which is being asked in many circles today. The answer is, unfortunately, not black or white nor is it easy to determine. However, there are today more serious players in the x-ray field than there were a few years ago and maybe this is an important indicator. In this paper we will try to establish if x-ray lithography can or can not be soundly justified.

Citation Download Citation

Alan D. Wilson "X-Ray Lithography: Can It Be Justified", Proc. SPIE 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV, (20 June 1985); https://doi.org/10.1117/12.947489

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