Absolute distance measurements with micrometer resolution using white-light spectral interferograms processed by a phase-locked loop method

Petr Hlubina; Vladimir Chugunov; Igor P. Gurov

doi:10.1117/12.552313

2 April 2004 Absolute distance measurements with micrometer resolution using white-light spectral interferograms processed by a phase-locked loop method

Petr Hlubina, Vladimir Chugunov, Igor P. Gurov

Author Affiliations +

Proceedings Volume 5399, Laser-Assisted Micro- and Nanotechnologies 2003; (2004) https://doi.org/10.1117/12.552313
Event: Laser-Assisted Micro- and Nanotechnologies 2003, 2003, St. Petersburg, Russian Federation

Abstract

A new spectral-domain interferometric method of measuring absolute distances is utilized when the effect of low dispersion in an interferometer is known and the spectral interference fringes are resolved over a wide spectral range. First, processing the recorded spectral interferograms by a phase-locked loop (PLL) method, which is a special simplified version of the general recurrence non-linear data processing method, the unmodulated spectrum, the spectral fringe visibility function and the unwrapped spectral fringe phase function are obtained. Then, knowing the dispersion relation for the material present in the interferometer, the material effective thickness is determined. Finally, the positions of the interferometer mirror are determined precisely by fitting the recorded spectral interferograms to the theoretical ones knowing all the mentioned spectral functions.

Citation Download Citation

Petr Hlubina, Vladimir Chugunov, and Igor P. Gurov "Absolute distance measurements with micrometer resolution using white-light spectral interferograms processed by a phase-locked loop method", Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); https://doi.org/10.1117/12.552313

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