Paper
5 April 2004 Atomic scale study of Cu and Ni(111) surface erosion under cluster bombardment
Evgeni E. Zhurkin, Anton S. Kolesnikov
Author Affiliations +
Abstract
Erosion and evolution of Ni and Cu(111) surface topography under impact of small N-atomic clusters (N=1÷55) with energies of 500 eV/atom is studied at atomic scale using a many-body potential. To provide final thermodynamics equilibrium state at non-zero (room) temperature, the Molecular Dynamics (MD) simulation was combined with statistical data sampling techniques in the frame of Metropolis Monte-Carlo (MMC) method. It was demonstrated that pronounced micro-crater surrounded by rim of ad-atoms is formed in the impact region above a threshold cluster size of around N=9. The impact of smaller clusters leads to formation of shallow craters or vacancies and ad-atom islands on a surface.
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Evgeni E. Zhurkin and Anton S. Kolesnikov "Atomic scale study of Cu and Ni(111) surface erosion under cluster bombardment", Proc. SPIE 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 April 2004); https://doi.org/10.1117/12.555385
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KEYWORDS
Chemical species

Picosecond phenomena

Electroluminescence

Nickel

Sputter deposition

Copper

Monte Carlo methods

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