Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region

M. S. Bibishkin; D. P. Chekhonadskih; N. I. Chkhalo; E. B. Kluyenkov; A. E. Pestov; Nikolai N. Salashchenko; L. A. Shmaenok; I. G. Zabrodin; S. Yu. Zuev

doi:10.1117/12.556949

28 May 2004 Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region

M. S. Bibishkin, D. P. Chekhonadskih, N. I. Chkhalo, E. B. Kluyenkov, A. E. Pestov, Nikolai N. Salashchenko, L. A. Shmaenok, I. G. Zabrodin, S. Yu. Zuev

Author Affiliations +

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.556949
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

In the paper, we report development of two reflectometers in IPM RAS. One enables investigation of the angular and spectral characteristics of mirrors with any shape of a reflecting surface in the 0.6-20 nm spectral range. The other, designed especially to study the influence of EUV sources on the reflecting characteristics of the mirrors, allows testing of flat samples. Owing to a high aperture ratio (solid angle of 0.034 steradian), high reflection coefficient of mirrors, powerful windowless X-ray tube, and effective detector, the reflectometer provides a resolution of the reflection coefficient variation at a level of 0.1%.

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M. S. Bibishkin, D. P. Chekhonadskih, N. I. Chkhalo, E. B. Kluyenkov, A. E. Pestov, Nikolai N. Salashchenko, L. A. Shmaenok, I. G. Zabrodin, and S. Yu. Zuev "Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.556949

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