Fabrication and characterization of single-mode integrated polymer waveguide components

Ermile Gaganidze; Karsten Litfin; Johannes Boehm; Steffi Finke; Patric Henzi; Roland Heidinger; Wilhelm Pfleging; Lothar Steinbock

doi:10.1117/12.544768

18 August 2004 Fabrication and characterization of single-mode integrated polymer waveguide components

Ermile Gaganidze, Karsten Litfin, Johannes Boehm, Steffi Finke, Patric Henzi, Roland Heidinger, Wilhelm Pfleging, Lothar Steinbock

Author Affiliations +

Proceedings Volume 5451, Integrated Optics and Photonic Integrated Circuits; (2004) https://doi.org/10.1117/12.544768
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

In this work the fabrication of integrated polymer waveguide components (waveguides, S-bends, splitters) by means of several approaches is reported. Fabrication of one type of waveguide involves laser-assisted micro-patterning of small grooves in (Polymethylmethacrylat) PMMA substrates which are subsequently filled with index-matched materials. Another type of waveguide is realized by local physical modification of PMMA in a laser direct writing process. The transmission characteristics of the waveguide were studied at the optical communication wavelengths of 1520-1620 nm. Fabrication of filled waveguides with oil as waveguide medium yielded low loss of 2.6 dB/cm and single-mode behavior for 10 μm wide grooves. Filling of 20 μm grooves with PMMA/MMA/dye mixture and subsequent polymerization yielded multi-mode waveguides with higher loss of 5.9 dB/cm. The laser direct writing (Nd:YAG, 266 nm) of waveguides showed loss of 6.3 dB/cm and multi-mode behavior indicating a need for further process optimization. Two Y-splitters fabricated by laser patterning and filling with branch radii of 10 mm and 25 mm showed device loss of 16 dB and 19 dB for a 25 mm device length. These results are compared to the performance of reference Y-splitters fabricated by UV-lithography, where parametric studies of the device geometry revealed the best branch radius of 20 mm.

Citation Download Citation

Ermile Gaganidze, Karsten Litfin, Johannes Boehm, Steffi Finke, Patric Henzi, Roland Heidinger, Wilhelm Pfleging, and Lothar Steinbock "Fabrication and characterization of single-mode integrated polymer waveguide components", Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); https://doi.org/10.1117/12.544768

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available