Properties of humidity sensors with porous Al2O3 as a dielectric layer

Bogdan Chachulski; Grzegorz Jasinski; Teresa Zajt; Antoni Nowakowski; Piotr Jasinski

doi:10.1117/12.577909

7 July 2004 Properties of humidity sensors with porous Al₂O₃ as a dielectric layer

Bogdan Chachulski, Grzegorz Jasinski, Teresa Zajt, Antoni Nowakowski, Piotr Jasinski

Proceedings Volume 5505, Optical Methods, Sensors, Image Processing, and Visualization in Medicine; (2004) https://doi.org/10.1117/12.577909
Event: Optical Methods, Sensors, Image Processing, and Visualization in Medicine, 2003, Gdansk, Poland

Abstract

The effect of humidity influence on characteristics of a ceramic sensor with a porous dielectric Al₂O₃ layer is presented. Influence of chosen electrolytic process parameters on electrical properties of the sensor is shown. The experimental data of two groups of sensors are interpreted using two, known from literature, electric equivalent circuits.

Citation Download Citation

Bogdan Chachulski, Grzegorz Jasinski, Teresa Zajt, Antoni Nowakowski, and Piotr Jasinski "Properties of humidity sensors with porous Al₂O₃ as a dielectric layer", Proc. SPIE 5505, Optical Methods, Sensors, Image Processing, and Visualization in Medicine, (7 July 2004); https://doi.org/10.1117/12.577909

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