Planar parabolic refractive lenses for hard x-rays: technological aspects of fabrication

Vyacheslav Yunkin; Maxim V. Grigoriev; Serguei Kuznetsov; Anatoly A. Snigirev; Irina I. Snigireva

doi:10.1117/12.563253

4 November 2004 Planar parabolic refractive lenses for hard x-rays: technological aspects of fabrication

Vyacheslav Yunkin, Maxim V. Grigoriev, Serguei Kuznetsov, Anatoly A. Snigirev, Irina I. Snigireva

Proceedings Volume 5539, Design and Microfabrication of Novel X-Ray Optics II; (2004) https://doi.org/10.1117/12.563253
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Planar parabolic refractive lenses are becoming the key optical elements for many hard x-ray microprobe and microscopy applications at third generation synchrotron radiation sources (e.g. the ESRF), as well as they are promising candidates for future X-ray free-electron lasers. In this paper we review all technological limitations taking place during fabrication of silicon and non-silicon refractive lenses and propose some approaches to overcome these limitations in order to fabricate high performance refractive lenses in terms of aperture, gain and focal spot size etc. We propose to use low-temperature silicon bonding techniques as alternative for very deep etching. Combination of two etched silicon structures by bonding of two lenses with relief to relief doubles the lens relief depth.

Citation Download Citation

Vyacheslav Yunkin, Maxim V. Grigoriev, Serguei Kuznetsov, Anatoly A. Snigirev, and Irina I. Snigireva "Planar parabolic refractive lenses for hard x-rays: technological aspects of fabrication", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.563253

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available