Paper
8 December 2004 Miniature fiber optic pressure sensor for turbine engines
Yizheng Zhu, Gary Pickrell, Xingwei Wang, Juncheng Xu, Bing Yu, Ming Han, Kristie L. Cooper, Anbo Wang, Aditya Ringshia, Wing Ng
Author Affiliations +
Proceedings Volume 5590, Sensors for Harsh Environments; (2004) https://doi.org/10.1117/12.575631
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States
Abstract
In this paper, we present a miniature fiber optic pressure sensor. The sensor is extrinsic Fabry-Perot interferometer (EFPI) based with its FP cavity directly fabricated on the tip of the fiber by fusion splicing and chemical etching. The processes are simple, with no other materials but silica fibers involved. The sensor has the same dimension as the fiber itself, only 125μm in diameter. The length of the FP cavity and the interference pattern will change in response to ambient pressure variation. The signal is demodulated by tracing the spectrum shift. Sensitivity can be adjusted for different applications with low or high pressure range. Prototype sensors were fabricated and tested for static response. Dynamic measurements were performed in a turbine engine. Theoretical and experimental analysis of the sensor response are also presented.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yizheng Zhu, Gary Pickrell, Xingwei Wang, Juncheng Xu, Bing Yu, Ming Han, Kristie L. Cooper, Anbo Wang, Aditya Ringshia, and Wing Ng "Miniature fiber optic pressure sensor for turbine engines", Proc. SPIE 5590, Sensors for Harsh Environments, (8 December 2004); https://doi.org/10.1117/12.575631
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CITATIONS
Cited by 9 scholarly publications.
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KEYWORDS
Sensors

Fiber optics sensors

Silica

Fiber optics

Etching

Photodiodes

Calibration

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