High-power Inchworm actuators for extended-range precision positioning

Galen Powers; Qin Xu; Thomas Guidarelli; James Smith

doi:10.1117/12.600584

5 May 2005 High-power Inchworm actuators for extended-range precision positioning

Galen Powers, Qin Xu, Thomas Guidarelli, James Smith

Proceedings Volume 5762, Smart Structures and Materials 2005: Industrial and Commercial Applications of Smart Structures Technologies; (2005) https://doi.org/10.1117/12.600584
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

A single small actuation system that provides high resolution [step size] of 2 nanometers (nm) over an extended range of 20 mm with consistent forces of 100 Newtons [peak values exceed 180 N] and integral power-off hold is described. Speeds of 60 mm/second can be shown but electronic efficiencies are much higher at 1 to 10 mm/s. Open- and closed-loop control is described. Progress on potential applications in adaptive optics, large optical beam control, and photonic and semiconductor test and measurement are noted. New data is presented showing ± 5-nm control of 100 Newton loads. Heat generation is estimated to be very small [110 mJ/hr] while actively holding position. Comparison of encoder and capacitance gage stability over time and temperature is discussed because it affects control in the 5-nm regime. This response can be contrasted with previous 2 kHz over 30-micrometer response for vibration or adaptive optics control. Performance of a new Class D switching amplifier that offers higher efficiencies at peak demands is described. The actuator design uses a set of three piezoelectric elements. These constitute 1100 nF of load. High speeds in the 20 to 60 mm/s range [up to 2500 Hz clamp change cycles] significantly affect power needed and design efficiencies. Alternative design options are presented with rationale for present design choices and resultant performance. The basic design allows for choices based on performance needed.

Citation Download Citation

Galen Powers, Qin Xu, Thomas Guidarelli, and James Smith "High-power Inchworm actuators for extended-range precision positioning", Proc. SPIE 5762, Smart Structures and Materials 2005: Industrial and Commercial Applications of Smart Structures Technologies, (5 May 2005); https://doi.org/10.1117/12.600584

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