Applicability of holographic technique for analysis of nonlinear dynamics of MEMS switch

Vytautas Ostasevicius; Minvydas Ragulskis; Arvydas Palevicius; V. Kravcenkiene; Giedrius Janusas

doi:10.1117/12.599027

16 May 2005 Applicability of holographic technique for analysis of nonlinear dynamics of MEMS switch

Vytautas Ostasevicius, Minvydas Ragulskis, Arvydas Palevicius, V. Kravcenkiene, Giedrius Janusas

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.599027
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

Recent technological advances have enabled the fabrication of mechanical resonators down to micrometer and even nanometer scales, with super high frequencies. One particularly interesting aspect of the physical behavior of microelectromechanical systems (MEMS) is their nonlinear mechanical response at relatively small deviations from equilibrium which is caused by nonlinear electromagnetic forces, nonlinear stiffness, heat transfer porperties. It is important to understand the nonlinear behavior of MEMS in order to improve their future designs. Hybrid numerical - experimental optical techniques are applied for holographic imaging and characterization of non-linearity in micro-mechanical relays, in particular their cantilevers. The apparent simplicity of the problem is misguiding due to non-linear interaction between the cantilever and the bottom electrode. Therefore the results of optical measurements of the cantilever dynamics are inaccurate due to the shift of the fringes in time average laser holographic interferograms. Numerical modeling helps to solve non-uniqueness of the inverse problem and to validate the interpretation of the pattern of fringes.

Citation Download Citation

Vytautas Ostasevicius, Minvydas Ragulskis, Arvydas Palevicius, V. Kravcenkiene, and Giedrius Janusas "Applicability of holographic technique for analysis of nonlinear dynamics of MEMS switch", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.599027

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