SiCN and Ta/TaN barriers for Cu/ultra low-k integration in 0.13µm technology

L. Y. Yang; D. H. Zhang; C. Y. Li; Peiwei Lu; P. D. Foo

doi:10.1117/12.608171

8 December 2004 SiCN and Ta/TaN barriers for Cu/ultralow-k integration in 0.13µm technology

L. Y. Yang, D. H. Zhang, C. Y. Li, Peiwei Lu, P. D. Foo

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.608171
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

Single damascene Cu lines using bi-layer Ta/TaN barrier with and without SiCN and plasma treatment for Cu-ultra low-k interconnect in 0.13μm technology have been investigated. It was found that the N₂/H₂ plasma treatment on the ULK surface before depositing barrier and Cu could reduce the line resistance significantly, but it also brought more surface defects on the sidewall and larger diffusion length. Compared with only Ta/TaN barrier layer structure, introduction of an additional SiCN layer could significantly improve the breakdown voltage, line to line leakage and thermal stability. This is because the thin SiCN layer not only effectively blocks diffusion of elements on both sides, but also significantly improves the mechanical property of the ultra low-k polymer.

Citation Download Citation

L. Y. Yang, D. H. Zhang, C. Y. Li, Peiwei Lu, and P. D. Foo "SiCN and Ta/TaN barriers for Cu/ultralow-k integration in 0.13µm technology", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.608171

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available