Multiple methods of modeling MEMS

Brien J. Housand; Leo Gardner; G. Groot Gregory

doi:10.1117/12.603814

19 May 2005 Multiple methods of modeling MEMS

Brien J. Housand, Leo Gardner, G. Groot Gregory

Proceedings Volume 5798, Spaceborne Sensors II; (2005) https://doi.org/10.1117/12.603814
Event: Defense and Security, 2005, Orlando, Florida, United States

Abstract

Micro-Electro-Mechanical Systems or MEMS are becoming increasingly important in several optical applications. In particular, devices composed of an array of active micro-optics can be used for wavefront correction, optical switching, and generic digital light control. Whatever the application, it is important for anyone seeking to employ this technology to use computer modeling to predict the performance of the subsystem that incorporates optical MEMS. In this paper we will show how commercially available software can be used to model these systems using several approaches.

Citation Download Citation

Brien J. Housand, Leo Gardner, and G. Groot Gregory "Multiple methods of modeling MEMS", Proc. SPIE 5798, Spaceborne Sensors II, (19 May 2005); https://doi.org/10.1117/12.603814

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