Optical systems design with integrated rigorous vector diffraction

Bernd H. Kleemann; Johannes Ruoff; Markus Seeßelberg; Johannes-Maria Kaltenbach; Christoph Menke; Hans-Jürgen Dobschal

doi:10.1117/12.622247

14 October 2005 Optical systems design with integrated rigorous vector diffraction

Bernd H. Kleemann, Johannes Ruoff, Markus Seeßelberg, Johannes-Maria Kaltenbach, Christoph Menke, Hans-Jürgen Dobschal

Proceedings Volume 5962, Optical Design and Engineering II; 596205 (2005) https://doi.org/10.1117/12.622247
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Depending on the specific application of a diffractive optical element (DOE), its polarization impact on the optical system must be taken into account. This may be necessary in imaging as well as in illumination optics, e. g., in miniaturized integrated optics or in high-resolution photolithographic projection systems. Sometimes, polarization effects are unwanted and therefore an exact characterization of their influences is necessary; in other cases a high polarization effect is the goal. It is well known how to calculate the point spread function (PSF) of a single diffractive micro-Fresnel lens. To do the same for a complete optical system with source, lenses, coatings, mirrors, gratings and diffractive elements, a 3D electrical field propagation along the geometric optical path is introduced into the ray-trace based optical systems design software in order to incorporate the entire electromagnetic polarization effects from the source to the image plane. Our software also considers the complex diffraction amplitudes including polarization effects from DOEs provided by rigorous electromagnetic methods. Together with a plane wave decomposition and with the local linear grating assumption, we are able to rigorously investigate the impact of e. g. polarization effects on the PSF of the whole optical system. Using this approach we analyze a hybrid diffractive-refractive microscope objective for mask inspection systems at 193 nm. Additionally we investigate focal properties of a sample diffractive blue laser disc pickup system.

Citation Download Citation

Bernd H. Kleemann, Johannes Ruoff, Markus Seeßelberg, Johannes-Maria Kaltenbach, Christoph Menke, and Hans-Jürgen Dobschal "Optical systems design with integrated rigorous vector diffraction", Proc. SPIE 5962, Optical Design and Engineering II, 596205 (14 October 2005); https://doi.org/10.1117/12.622247

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available