A new optical metrology tool for measuring aspheres

Gerd Jakob; Matthias Meyer; Thomas Fries

doi:10.1117/12.625534

19 October 2005 A new optical metrology tool for measuring aspheres

Gerd Jakob, Matthias Meyer, Thomas Fries

Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 59651Z (2005) https://doi.org/10.1117/12.625534
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

One of the most actual needs in metrology is the possibility to investigate aspheres. With many optical metrology tools this is just not possible in a direct way. This task needs a completely new category of metrology tools. A new approach for this application is presented. The measuring machine performs high resolution, fast and non contact measurement of lens profiles. The geometry of the lens might be spherical or aspherical. The maximum profile length is 180 degree, maximum lens height is 50 mm. The alignment of the centre of the lens is done automatically. As an option the system may be extended into a fully 3D metrology tool.

Citation Download Citation

Gerd Jakob, Matthias Meyer, and Thomas Fries "A new optical metrology tool for measuring aspheres", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59651Z (19 October 2005); https://doi.org/10.1117/12.625534

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