A novel GDSII compression technique

Mark Pereira; Barsha Baruah

doi:10.1117/12.632068

8 November 2005 A novel GDSII compression technique

Mark Pereira, Barsha Baruah

Author Affiliations +

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 59923N (2005) https://doi.org/10.1117/12.632068
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

With the ever increasing layout data size due to finer geometries and resolution enhancement techniques such as OPC and PSM, handling several tens of gigabytes of GDSII data is becoming very difficult. While new efficient OASIS format is being proposed to replace it, GDSII is here to stay for next several years. This paper discusses two approaches by which the GDSII data can be handled effectively. Reversible compression will be able to produce original GDSII file bit-by-bit and can produce compression of around 20 times. Irreversible compression can produce functionally equivalent GDSII after decompression.

Citation Download Citation

Mark Pereira and Barsha Baruah "A novel GDSII compression technique", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59923N (8 November 2005); https://doi.org/10.1117/12.632068

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