Acidolysis small molecular phenolic ether used as accelerator in photosensitive diazonaphthaquinone systems

Haihua Zhou; Yingquan Zou

doi:10.1117/12.655973

29 March 2006 Acidolysis small molecular phenolic ether used as accelerator in photosensitive diazonaphthaquinone systems

Haihua Zhou, Yingquan Zou

Author Affiliations +

Proceedings Volume 6153, Advances in Resist Technology and Processing XXIII; 61534J (2006) https://doi.org/10.1117/12.655973
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

The photosensitive compounds in the photosensitive coatings of positive PS plates are the diazonaphthaquinone derivatives. Some acidolysis small molecular phenolic ethers, which were synthesized by some special polyhydroxyl phenols with vinyl ethyl ether, are added in the positive diazonaphthaquinone photosensitive composition to improve its sensitivity, composed with photo-acid-generators. The effects to the photosensitivity, anti-alkali property, anti-isopropyl alcohol property, dot resolution and line resolution of the coatings are studied with different additive percent of the special phenolic ethers. In the conventional photosensitive diazonaphthaquinone systems for positive PS plates, the photosensitivity is improved without negative effects to resolution, anti-alkali and anti-isopropyl alcohol properties when added about 5% of the special acidolysis phenolic ethers, EAAE or DPHE, composed with photo-acid-generators.

Citation Download Citation

Haihua Zhou and Yingquan Zou "Acidolysis small molecular phenolic ether used as accelerator in photosensitive diazonaphthaquinone systems", Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 61534J (29 March 2006); https://doi.org/10.1117/12.655973

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