Magnetically actuated micropumps using an Fe-PDMS composite membrane

Jonathan J. Nagel; George Mikhail; Hongseok Noh; Jeonghoi Koo

doi:10.1117/12.658012

31 March 2006 Magnetically actuated micropumps using an Fe-PDMS composite membrane

Jonathan J. Nagel, George Mikhail, Hongseok Noh, Jeonghoi Koo

Proceedings Volume 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; 617213 (2006) https://doi.org/10.1117/12.658012
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2006, San Diego, California, United States

Abstract

In this paper we describe a novel Fe-PDMS composite that can be used to create magnetically actuated polymeric microstructures. The composite is formed by suspending <10μm iron (Fe) particles in polydimethylsiloxane (PDMS) at concentrations ranging from 25-75% by weight. Material properties and processing capabilities have been examined, and to demonstrate material's usefulness we have designed, fabricated, and tested two prototypical micropumps that utilize an Fe-PDMS actuator membrane.

Citation Download Citation

Jonathan J. Nagel, George Mikhail, Hongseok Noh, and Jeonghoi Koo "Magnetically actuated micropumps using an Fe-PDMS composite membrane", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 617213 (31 March 2006); https://doi.org/10.1117/12.658012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available