Paper
10 June 2006 Formation of ordered arrays of Ag nanowires and nanodots on Si(557) surface
R. Zhachuk, S. Teys, A. Dolbak, B. Olshanetsky
Author Affiliations +
Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 62600X (2006) https://doi.org/10.1117/12.683291
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation
Abstract
Formation of ordered arrays of Ag nanowires and nanodots on stepped Si(557) silicon surface have been studied by scanning tunneling microscopy, low energy electron diffraction and Auger electron spectroscopy. It was found that the shape of the Ag islands being formed depends drastically on preliminary exposure of a Si sample in the vacuum chamber. This effect may be caused by the adsorption of small amounts (less than a percent of a monolayer) of oxygen on Si surface from the residual atmosphere in the vacuum chamber. When silver is deposited on a clean Si(557) surface the wide epitaxial silver islands form. After exposure, silver nanostructures can be obtained in the form of nanowires extended along the edges of steps or nanodots ordered in lines parallel to these edges depending on the exposition.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Zhachuk, S. Teys, A. Dolbak, and B. Olshanetsky "Formation of ordered arrays of Ag nanowires and nanodots on Si(557) surface", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62600X (10 June 2006); https://doi.org/10.1117/12.683291
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KEYWORDS
Silver

Oxygen

Silicon

Nanowires

Scanning tunneling microscopy

Nanostructures

Adsorption

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