Replication technology as a means of implementing polymer MOEMS

Jin Tae Kim; Jung Jin Ju; Suntak Park; Seung Koo Park; Min-Su Kim; Hyung-Jong Lee; Myung-Hyun Lee

doi:10.1117/12.715102

7 March 2007 Replication technology as a means of implementing polymer MOEMS

Jin Tae Kim, Jung Jin Ju, Suntak Park, Seung Koo Park, Min-Su Kim, Hyung-Jong Lee, Myung-Hyun Lee

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64620H (2007) https://doi.org/10.1117/12.715102
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Replication technologies have been recommended as an alternative means of high volume manufacturing of the polymer optical components with low-cost. We demonstrated replication technology as a means of implementing polymer-based MOEMS. To achieve this, a polymer optical bench with embedded electric circuits was designed to integrate the functional planar-lightwave-circuit (PLC)-type optical waveguide devices; the designed packaging structures were realized using a novel fabrication process that incorporated the UV imprint technique. In addition, the detail fabrication steps of the UV imprint process were investigated. The optical bench has v-grooves for the fiber ribbon and the alignment pits for opoelectronic interconnection. The plastic mold for imprinting the designed optical bench was made of UV-transparent perfluorinated polymer material. The designed optical bench was configured on the electric-circuitpatterned silicon substrate. Flip-chip bonded polymer optical waveguide device showed not only a good electric contact but also a coupling loss of 0.9 dB at a wavelength of 1.5 ?m. It was concluded that replication technology has versatile application capabilities in manufacturing next generation optical interconnect systems.

Citation Download Citation

Jin Tae Kim, Jung Jin Ju, Suntak Park, Seung Koo Park, Min-Su Kim, Hyung-Jong Lee, and Myung-Hyun Lee "Replication technology as a means of implementing polymer MOEMS", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620H (7 March 2007); https://doi.org/10.1117/12.715102

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