Stretched polymer nanohairs by nanodrawing

Hoon Eui Jeong; Sung Hoon Lee; Pilnam Kim; Kahp Y. Suh

doi:10.1117/12.712790

15 March 2007 Stretched polymer nanohairs by nanodrawing

Hoon Eui Jeong, Sung Hoon Lee, Pilnam Kim, Kahp Y. Suh

Proceedings Volume 6517, Emerging Lithographic Technologies XI; 65171K (2007) https://doi.org/10.1117/12.712790
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

We present a simple method for fabricating high aspect-ratio polymer nanostructures on a solid substrate by sequential application of molding and drawing of a thin polymer film. In this method, a thin polymer film is prepared by spin coating on a solid substrate and the temperature is raised above the polymer's glass transition while in conformal contact with a poly(urethane acrylate) (PUA) mold having nano-cavities. Consequently, capillary force induces deformation of the polymer melt into the void spaces of the mold and the filled nanostructure was further elongated upon removal of the mold due to tailored adhesive force at the mold/polymer interface. The optimum value of the work of adhesion at the mold/polymer interface ranged from 0.9 to 1.1 times that at the substrate/polymer interface. Below or above this range, a simple molding or detachment occurred, corresponding to earlier findings.

Citation Download Citation

Hoon Eui Jeong, Sung Hoon Lee, Pilnam Kim, and Kahp Y. Suh "Stretched polymer nanohairs by nanodrawing", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65171K (15 March 2007); https://doi.org/10.1117/12.712790

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