Laser spot measuring and position method with sub-pixel precision

Hong-yan Zhuo

doi:10.1117/12.790760

19 February 2008 Laser spot measuring and position method with sub-pixel precision

Hong-yan Zhuo

Proceedings Volume 6625, International Symposium on Photoelectronic Detection and Imaging 2007: Related Technologies and Applications; 66250A (2008) https://doi.org/10.1117/12.790760
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

In order to detection and position the center of laser spot, the method based sub-pixel technology is set up. Under the conditions of no change on the dimensions of CCD detector, sub-pixel method can improve the position precision up to sub-pixel level. The basic principle of sub-pixel method is to precisely position the target with sub-pixel precision by applying the inner interpolation algorithm with the gray distribution characters of target spot in the pattern. At first, the algorithm of edge detection is used for original image and the precision is pixel level. Then, the algorithms to interpolation and approximation based on the first step are used to extract edge, the precision reaches sub-pixel level. Experiments show the position precision to center of laser spot is about 0.1μm.

Citation Download Citation

Hong-yan Zhuo "Laser spot measuring and position method with sub-pixel precision", Proc. SPIE 6625, International Symposium on Photoelectronic Detection and Imaging 2007: Related Technologies and Applications, 66250A (19 February 2008); https://doi.org/10.1117/12.790760

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