Paper
11 September 2007 Flexible Bragg reflection waveguide devices fabricated on a plastic substrate
Kyung-Jo Kim, Jeong-Ah Yi, Min-Cheol Oh, Young-Ouk Noh, Hyung-Jong Lee
Author Affiliations +
Abstract
Bragg reflecting waveguide devices are fabricated on a flexible substrate by using a post lift-off process in order to provide highly uniform grating patterns on a wide range. In this process, the flexible substrate spin-coated on silicon wafer is released after the final fabrication process of chip dicing. The fabricated flexible Bragg reflector shows very sharp transmission spectrum with 3-dB bandwidth of 0.1 nm and 10-dB bandwidth of 0.4 nm, which proves the Bragg reflector has excellent uniformity. To achieve athermal operation of the flexible Bragg reflector, thermal expansion property of the plastic substrate is controlled by the thickness of two polymer materials constructing the plastic substrate. The flexible substrate with 0.7-μm SU-8 layers sandwiching 100-μm NOA61 layer provides an optimized thermal expansion property to compensate the thermo-optic effect of the waveguide made of ZPU polymer. The temperature dependence of the Bragg reflector is decreased to -0.011 nm/°C through the incorporation of the plastic substrate.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kyung-Jo Kim, Jeong-Ah Yi, Min-Cheol Oh, Young-Ouk Noh, and Hyung-Jong Lee "Flexible Bragg reflection waveguide devices fabricated on a plastic substrate", Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 66451W (11 September 2007); https://doi.org/10.1117/12.733470
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Polymers

Waveguides

Reflectors

Polymer multimode waveguides

Silicon

Cladding

Reflection

RELATED CONTENT


Back to Top