Flexible Bragg reflection waveguide devices fabricated on a plastic substrate

Kyung-Jo Kim; Jeong-Ah Yi; Min-Cheol Oh; Young-Ouk Noh; Hyung-Jong Lee

doi:10.1117/12.733470

11 September 2007 Flexible Bragg reflection waveguide devices fabricated on a plastic substrate

Kyung-Jo Kim, Jeong-Ah Yi, Min-Cheol Oh, Young-Ouk Noh, Hyung-Jong Lee

Proceedings Volume 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV; 66451W (2007) https://doi.org/10.1117/12.733470
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

Bragg reflecting waveguide devices are fabricated on a flexible substrate by using a post lift-off process in order to provide highly uniform grating patterns on a wide range. In this process, the flexible substrate spin-coated on silicon wafer is released after the final fabrication process of chip dicing. The fabricated flexible Bragg reflector shows very sharp transmission spectrum with 3-dB bandwidth of 0.1 nm and 10-dB bandwidth of 0.4 nm, which proves the Bragg reflector has excellent uniformity. To achieve athermal operation of the flexible Bragg reflector, thermal expansion property of the plastic substrate is controlled by the thickness of two polymer materials constructing the plastic substrate. The flexible substrate with 0.7-μm SU-8 layers sandwiching 100-μm NOA61 layer provides an optimized thermal expansion property to compensate the thermo-optic effect of the waveguide made of ZPU polymer. The temperature dependence of the Bragg reflector is decreased to -0.011 nm/°C through the incorporation of the plastic substrate.

Citation Download Citation

Kyung-Jo Kim, Jeong-Ah Yi, Min-Cheol Oh, Young-Ouk Noh, and Hyung-Jong Lee "Flexible Bragg reflection waveguide devices fabricated on a plastic substrate", Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 66451W (11 September 2007); https://doi.org/10.1117/12.733470

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