A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctions

Philip W. T. Pong; Moshe Schmoueli; Eliezer Marcus; William F. Egelhoff Jr.

doi:10.1117/12.731143

10 September 2007 A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctions

Philip W. T. Pong, Moshe Schmoueli, Eliezer Marcus, William F. Egelhoff Jr.

Author Affiliations +

Proceedings Volume 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing; 66480P (2007) https://doi.org/10.1117/12.731143
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

The advancement of the technology of magnetic tunnel junctions (MTJs) greatly hinges on the optimization of the magnetic materials, fabrication process, and annealing conditions which involve characterization of a large number of samples. As such, it is of paramount importance to have a rapid-turnaround characterization method since the characterization process can take even longer time than the fabrication. Conventionally, micropositioners and probe tips are manually operated to perform 4-point electrical measurement on each individual device which is a time-consuming, low-throughput process. A commercial automatic probe card analyzer can provide high turnaround; however, it is expensive and involves much cost and labor to install and maintain the equipment. In view of this, we have developed a novel low-cost, home-made, high-throughput probe card analyzer system for characterization of MTJs. It can perform fast 4-probe electrical measurements including current vs voltage, magnetoresistance, and bias dependence measurements with a high turnaround of about 500 devices per hour. The design and construction of the system is discussed in detail in this paper.

Citation Download Citation

Philip W. T. Pong, Moshe Schmoueli, Eliezer Marcus, and William F. Egelhoff Jr. "A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctions", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480P (10 September 2007); https://doi.org/10.1117/12.731143

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