Non-goniometric scatterometry: a review

Cornelius Hahlweg; Hendrik Rothe

doi:10.1117/12.734098

13 September 2007 Non-goniometric scatterometry: a review

Cornelius Hahlweg, Hendrik Rothe

Proceedings Volume 6682, Polarization Science and Remote Sensing III; 66820D (2007) https://doi.org/10.1117/12.734098
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

During the past decades a lot of research in the field of scatterometry and its applications has been done. Along with the goniometer devices such as the CASI several non-goniometrical approaches have been developed and investigated. Among these one main principle is the mapping of at least parts of the hemisphere onto planar sensors without the need of mechanical movements. This mapping can be realized using dioptrical, catoptrical and catadioptrical systems. In recent years we followed these three principles and built a series of devices based on the continuous optical mapping of the hemisphere to the plane, tested against a reference goniometer system (CASI). The functionality of these devices has been shown for coherent and non-coherent illumination, over VIS, NIR, SWIR and TIR. Monochromatic and hyperspectral measurements have been performed. The current paper gives a review on these systems and introduces some generalization of the optical properties of these devices, concluding in easy-to-handle design rules and concepts.

Citation Download Citation

Cornelius Hahlweg and Hendrik Rothe "Non-goniometric scatterometry: a review", Proc. SPIE 6682, Polarization Science and Remote Sensing III, 66820D (13 September 2007); https://doi.org/10.1117/12.734098

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