ZnO nanocrystalline thin films prepared by ion beam enhanced deposition method

N. Y. Yuan; J. H. Li; Z. J. He; G. Li; X. Q. Wang

doi:10.1117/12.783662

14 November 2007 ZnO nanocrystalline thin films prepared by ion beam enhanced deposition method

N. Y. Yuan, J. H. Li, Z. J. He, G. Li, X. Q. Wang

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67224B (2007) https://doi.org/10.1117/12.783662
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

In-N codoped ZnO nanocrystalline films were prepared on Si and glass substrates by Ion beam enhanced deposition method. The In-N codoped ZnO nanocrystalline films deposited on Si substrates are found to have a preferred (002) orientation, smooth surface and high density. P-type ZnO thin films were obtained. Room temperature photoluminescence measurements indicated that the ZnO nanocrystalline films had two UV emission peaks and several visible emission peaks.

Citation Download Citation

N. Y. Yuan, J. H. Li, Z. J. He, G. Li, and X. Q. Wang "ZnO nanocrystalline thin films prepared by ion beam enhanced deposition method", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67224B (14 November 2007); https://doi.org/10.1117/12.783662

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Zinc oxide

Ultraviolet radiation

Ion beams

Annealing

Silicon

Deposition processes

Transmittance

Show All Keywords

Keywords/Phrases

Search In:

Publication Years