Light emitting diodes based on GaPN/Si for optoelectronic integrated circuits

Y. Furukawa; H. Yonezu; A. Wakahara

doi:10.1117/12.735932

10 September 2007 Light emitting diodes based on GaPN/Si for optoelectronic integrated circuits

Y. Furukawa, H. Yonezu, A. Wakahara

Proceedings Volume 6775, Active and Passive Optical Components for Communications VII; 67750M (2007) https://doi.org/10.1117/12.735932
Event: Optics East, 2007, Boston, MA, United States

Abstract

We have tried to monolithically merge light emitting devices into Si large-scale integrated circuits in a single chip for realization of optoelectronic integrated circuits (OEICs). OEICs could be realized for parallel information processing, optical interconnection and other applications. Structural defect-free GaPN and InGaPN layers were grown on a Si (100) substrate by using migration enhanced epitaxy and molecular beam epitaxy. A dislocation-free Si/GaPN/Si structure, which is a basic structure for OEICs, was successfully grown as well. In addition, control of electron and hole concentrations in GaPN was achieved by S(or Te)- and Mg-doping, respectively. Subsequently, a lattice-matched InGaPN/GaPN double-heterostructure (DH) light emitting diode (LED) was realized on a Si substrate. Moreover, fabrication process flow for OEIC was developed and applied to a Si/InGaPN/GaPN DH LED/Si layers. As a result, LEDs and metal-oxide-semiconductor field effect transistors were monolithically integrated in a single chip for the first time. When the luminescence efficiency is improved and micro-size LEDs based on GaPN are developed, novel OEICs would be realized.

Citation Download Citation

Y. Furukawa, H. Yonezu, and A. Wakahara "Light emitting diodes based on GaPN/Si for optoelectronic integrated circuits", Proc. SPIE 6775, Active and Passive Optical Components for Communications VII, 67750M (10 September 2007); https://doi.org/10.1117/12.735932

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available