Quantitative Analysis Of Thin Film Morphology Evolution

Joseph E Yehoda; Russell Messier

doi:10.1117/12.939536

23 December 1986 Quantitative Analysis Of Thin Film Morphology Evolution

Joseph E Yehoda, Russell Messier

Proceedings Volume 0678, Optical Thin Films II: New Developments; (1986) https://doi.org/10.1117/12.939536
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

There is considerable evidence that thin film morphology, which includes both the film top surface and internal void network structure, is a key link between film preparation processes and resulting film characteristics and properties. Quantitative preparation-property relations can only be obtained after a realistic morphology model is developed in sufficient detail. In this study we consider morphology in the context of our evolutionary structure zone model and introduce several methods for quantifying recorded images of the morphology.

Citation Download Citation

Joseph E Yehoda and Russell Messier "Quantitative Analysis Of Thin Film Morphology Evolution", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); https://doi.org/10.1117/12.939536

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