Mechanics of the dynamic release process for stiction failed microcantilever beams using structural vibrations

Amit Savkar; Kevin D. Murphy

doi:10.1117/12.783835

19 February 2008 Mechanics of the dynamic release process for stiction failed microcantilever beams using structural vibrations

Amit Savkar, Kevin D. Murphy

Author Affiliations +

Proceedings Volume 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII; 68840A (2008) https://doi.org/10.1117/12.783835
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Recently it has been shown that structural vibrations are an efficient means to repair stiction failed microcantilever beams. Experiments and analysis have identified excitation parameters (amplitude and frequency) that successfully initiated the debonding process between the microcantilever and the substrate. That analysis could not describe what happened after the debonding process was initiated. For example it could not predict if the beam would transition from a s-shaped to an arc-shaped configuration or even be repaired to a free-standing beam. The current research examines the post-initiation behavior of stiction failed microcantilever beams. A new-coupled fracture/vibration model is formulated and used to track the evolution of the repair in order to determine the extent of repair under various conditions. This model successfully explains phenomenological observations made during the experiments regarding the repair process being dependent on direction of frequency sweeps, complete and partial repair, and monitors the degree of repair no repair, partial repair or complete repair along with releases time associated with such repairs.

Citation Download Citation

Amit Savkar and Kevin D. Murphy "Mechanics of the dynamic release process for stiction failed microcantilever beams using structural vibrations", Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840A (19 February 2008); https://doi.org/10.1117/12.783835

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