(AlGaIn)N UV LEDs for integrated metal-oxide based ozone sensors

J. Wagner; Ch. Y. Wang; C.-C. Röhlig; M. Maier; M. Kunzer; T. Passow; W. Schirmacher; W. Pletschen; V. Cimalla; K. Köhler; O. Ambacher

doi:10.1117/12.761128

13 February 2008 (AlGaIn)N UV LEDs for integrated metal-oxide based ozone sensors

J. Wagner, Ch. Y. Wang, C.-C. Röhlig, M. Maier, M. Kunzer, T. Passow, W. Schirmacher, W. Pletschen, V. Cimalla, K. Köhler, O. Ambacher

Author Affiliations +

Proceedings Volume 6910, Light-Emitting Diodes: Research, Manufacturing, and Applications XII; 69100X (2008) https://doi.org/10.1117/12.761128
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

There is a high demand for compact low-cost ozone (O₃) sensors. It has been shown that indium oxide (In₂O₃) thin films grown by metal-organic vapor-phase epitaxy (MOVPE) act as an O3 sensitive material, which can be activated at roomtemperature by ultraviolet (UV) light. In the present work we integrated the In₂O₃ sensing thin film and an (AlGaIn)N based near-UV LED back-to-back on a single sensor chip. The integrated In₂O₃ film-LED sensor was exposed to varying ozone concentrations ranging from 38 ppb to 726 ppb and found to be sensitive to even the lowest O₃ concentration.

Citation Download Citation

J. Wagner, Ch. Y. Wang, C.-C. Röhlig, M. Maier, M. Kunzer, T. Passow, W. Schirmacher, W. Pletschen, V. Cimalla, K. Köhler, and O. Ambacher "(AlGaIn)N UV LEDs for integrated metal-oxide based ozone sensors", Proc. SPIE 6910, Light-Emitting Diodes: Research, Manufacturing, and Applications XII, 69100X (13 February 2008); https://doi.org/10.1117/12.761128

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available