Protection from surface oxidation of Ru capping layers for EUVL projection optics mirrors by introducing hydrocarbon gas

Keigo Koida; Masahito Niibe; Yukinobu Kakutani; Shuichi Matsunari; Takashi Aoki; Shigeru Terashima; Takahiro Nakayama; Hiromitsu Takase; Yasuaki Fukuda

doi:10.1117/12.771814

21 March 2008 Protection from surface oxidation of Ru capping layers for EUVL projection optics mirrors by introducing hydrocarbon gas

Keigo Koida, Masahito Niibe, Yukinobu Kakutani, Shuichi Matsunari, Takashi Aoki, Shigeru Terashima, Takahiro Nakayama, Hiromitsu Takase, Yasuaki Fukuda

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69213C (2008) https://doi.org/10.1117/12.771814
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

We investigated the protection of a Ru-capped Mo/Si multilayer from surface oxidation under exposure to EUV radiation in the presence of water vapor and isopropyl alcohol (IPA). Degradation of the reflectance of the Ru-capped Mo/Si multilayer by EUV irradiation was controlled by introducing IPA gas. We also investigated the reduction effect of the oxide layer in a multilayer mirror by introducing ethanol and exposed EUV. The Ru-capped multilayer sample was exposed to EUV radiation in the presence of only water vapor to oxidize its surface. The reflectance decreased by about 1.5%. Then the sample was exposed to EUV radiation in the presence of only ethanol vapor. The reflectivity of the sample was recovered to +0.5%, and the atomic concentration of oxygen in the irradiated area was decreased by EUV irradiation in the presence of ethanol.

Citation Download Citation

Keigo Koida, Masahito Niibe, Yukinobu Kakutani, Shuichi Matsunari, Takashi Aoki, Shigeru Terashima, Takahiro Nakayama, Hiromitsu Takase, and Yasuaki Fukuda "Protection from surface oxidation of Ru capping layers for EUVL projection optics mirrors by introducing hydrocarbon gas", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69213C (21 March 2008); https://doi.org/10.1117/12.771814

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