Surface morphology of (100) ZnTe: P layer homoepitaxially grown by horizontal MOVPE technique

K. Yamaguchi; Y. Kuramitsu; K. Saito; T. Tanaka; M. Nishio; Q. Guo; H. Ogawa

doi:10.1117/12.792281

11 March 2008 Surface morphology of (100) ZnTe: P layer homoepitaxially grown by horizontal MOVPE technique

K. Yamaguchi, Y. Kuramitsu, K. Saito, T. Tanaka, M. Nishio, Q. Guo, H. Ogawa

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69840M (2008) https://doi.org/10.1117/12.792281
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

The surface morphology and roughness of (100) P-doped ZnTe homoepitaxial layers grown by horizontal MOVPE using tris-dimethylaminophosphorus have been investigated as a function of substrate temperature under two different source transport rate conditions together with the photoluminescence property. The surface is marked by a dense ridging when the growth is limited by reaction-kinetics on the grown surface, whereas the surfaces of the layers grown in the mass-transport limited regime show morphology consisted of a series of hillocks, independent of the transport rate. The growth condition close to the transition part between the mass-transport and the surface-kinetics regimes provide an optimum growth not only for achieving a minimum surface roughness, but also for a better photoluminescence property of the as-grown P-doped ZnTe layer.

Citation Download Citation

K. Yamaguchi, Y. Kuramitsu, K. Saito, T. Tanaka, M. Nishio, Q. Guo, and H. Ogawa "Surface morphology of (100) ZnTe: P layer homoepitaxially grown by horizontal MOVPE technique", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69840M (11 March 2008); https://doi.org/10.1117/12.792281

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available